Progress and Prospects of Key Technologies in RF Microsystems

keywords:RF microsystems,3D integration interconnection,multiphysics-fields simulation,3D integrated architecture

Abstract:This paper briefly introduces the development of microwave integrated circuits, summarizes the major research projects and levels of domestic and foreign institutions represented by DARPA USA in RF microsystems, and briefly describes the representative applications of RF microsystems in communication, radar, phased array and other fields. Three key technologies of RF microsystem interconnection, simulation and optimization, integrated architecture design and their progress are summarized. Finally, the future development trend of RF microsystem is prospected.